Industry | 2007.10.02
Interconnect Metrology Confidently Looks at 32 nm - Semiconductor International
| Interconnect Metrology Confidently Looks at 32 nm Semiconductor International - Spectroscopic ellipsometry can be used because it enables the simultaneous measurement of these materials' thickness and index. ... |
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http://www.semiconductor.net/article/CA6[...]ustryid%3D47298&cid=1121559165
