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Technology | 2016.04.27

SUSS MicroTec Relies on Eco-Friendly LED-Technology for Mask Aligner

GARCHING, Germany--(BUSINESS WIRE)--SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor and related markets, today announced the launch of a new UV-LED lamp house for use in its first exposure tools, which have a leading position in the market for more than fifty years. SUSS MicroTec strives to bring sustainability and economic thinking in line with ecological aspects. With the development and implementation of the environmentally low impact UV-LED lamp ho

 

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